Micromachined phase-shifted array-type Mirau interferometer for swept-source OCT imaging: design, microfabrication and experimental validation.

OCT instruments permit fast and non-invasive 3D optical biopsies of biological tissues. However, they are bulky and expensive, making them only affordable at the hospital and thus, not sufficiently used as an early diagnostic tool. Significant reduction of system cost and size is achieved by implementation of MOEMS technologies.

Wafer-level fabrication of multi-element glass lenses: lens doublet with improved optical performances.

This Letter reports on the fabrication of glass lens doublets arranged in arrays and realized at wafer level by means of micro-fabrication. The technique is based on the accurate vertical assembly of separately fabricated glass lens arrays. Since each one of these arrays is obtained by glass melting in silicon cavities, silicon is employed as a spacer in order to build a well-aligned and robust optical module.

Impact of mirror spider legs on imaging quality in Mirau micro-interferometry.

We report the impact on imaging quality of mirror suspensions, referred to as spider legs, used to support the reference mirror in a Mirau micro-interferometer that requires the vertical alignment of lens, mirror, and beamsplitter. Because the light goes from the microlens to the beamsplitter through the mirror plane, the spider legs are a source of diffraction. This impact is studied as a function of different parameters of the spider legs design.

Dense arrays of millimeter-sized glass lenses fabricated at wafer-level.

This paper presents the study of a fabrication technique of lenses arrays based on the reflow of glass inside cylindrical silicon cavities. Lenses whose sizes are out of the microfabrication standards are considered. In particular, the case of high fill factor arrays is discussed in detail since the proximity between lenses generates undesired effects.