Controlling leakage losses in subwavelength grating silicon metamaterial waveguides.

Subwavelength gratings (SWG) are photonic structures with a period small enough to suppress diffraction, thereby acting as artificial dielectric materials, also called all-dielectric metamaterials. This property has been exploited in many high-performance photonic integrated devices in the silicon-on-insulator (SOI) platform. While SWG waveguides are theoretically lossless, they may exhibit leakage penalty to the substrate due to a combination of reduced modal confinement and finite thickness of the buried oxide (BOX) layer.