Dielectric characteristics of barium strontium titanate films prepared by aerosol deposition on a Cu substrate.

Polycrystalline barium strontium titanate (Ba(x)Sr(1-x)TiO(3), BST) films were directly prepared on copper substrates using an aerosol deposition method (ADM) at room temperature. Electric properties, such as the dielectric constant and tunability, were investigated as a function of the Ba content in Ba(x)Sr(1-x)TiO(3) (x = 1.0, 0.

Thickness dependence of electrical properties of PZT films deposited on metal substrates by laser-assisted aerosol deposition.

Dependence of electrical properties-dielectric, ferroelectric, and piezoelectric properties-on film thickness was studied for lead-zirconate titanate (PZT) thick films directly deposited onto stainless-steel (SUS) substrates in actuator devices by using a carbon dioxide (CO(2) ), laser assisted aerosol deposition technique. Optical spectroscopic analysis data and laser irradiation experiments revealed that absorption at a given wavelength by the film increased with increasing film thickness. Dielectric constant epsilon, remanent polarization value P(r), and coercive field strength E(c) of PZT films directly deposited onto a SUS-based piezoelectric actuator substrate annealed by CO(2) laser irradiation at 850 degrees C improved with increasing film thickness, and for films thicker than 25 microm, epsilon 800, P(r) 40 microC/cm(2), and E(c) 45 kV/cm.

Optical properties of pb(Zr,Ti)O(3) films prepared by aerosol deposition.

The optical properties and related band structure of ferroelectric lead zirconate titanate [PZT, Pb(Zr0(0.6)Ti0(0.4))O(3)] films prepared on glass substrates at room temperature by aerosol deposition were investigated.

Fabrication and scanning-angle temperature dependence of metal-based, optical resonant scanners with PZT actuation.

Metal-based, optical scanning devices with a large mirror size of 1 mm(2) and a wide scanning angle of over 90 degrees were fabricated. A high optical scanning angle (90 degrees ) was achieved at a resonance frequency of 7.33 kHz and a driving voltage of 80 V (peak-to-peak) in ambient air without vacuum packaging.

High-precision detection method for the reference position in an optical encoder.

A new detection method for the reference position (zero position) of an optical encoder by using a diffraction grating with variable pitch is proposed. Movement of the diffraction grating changes the position of the grating relative to the radiating laser spot, altering the grating pitch that is illuminated by the laser and causing a change in the diffraction angle of the beam. The change is detected by two photodiodes.