Based on uniformity measurements of large-area reference sources used in calibration procedures of surface contamination monitors, an investigation was carried out to obtain a method that estimates the bias originated from surface source intensity distribution deviation from the ideal uniform distribution and corrects it. It relies on correcting the estimated instrument efficiency by applying correction factors driven from the uniformity distribution profiles of the sources used in calibration procedure. Simulations of the monitor calibration procedure are run for 2 distinct surface source distributions: the real and the ideally uniform distributions.
View Article and Find Full Text PDF