Integration of P-CuO Thin Sputtered Layers onto Microsensor Platforms for Gas Sensing.

P-type semiconducting copper oxide (CuO) thin films deposited by radio-frequency (RF) sputtering were integrated onto microsensors using classical photolithography technologies. The integration of the 50-nm-thick layer could be successfully carried out using the lift-off process. The microsensors were tested with variable thermal sequences under carbon monoxide (CO), ammonia (NH₃), acetaldehyde (C₂H₄O), and nitrogen dioxide (NO₂) which are among the main pollutant gases measured by metal-oxide (MOS) gas sensors for air quality control systems in automotive cabins.