An Improved Passivity-based Control of Electrostatic MEMS Device.

It is commonly known that the performance of an electrostatic microelectromechanical system (MEMS) device is limited to a specific range of the full gap distance due to the inherited "pull-in instability" phenomenon. In this work, we design a controller to extend the stabilization range of an electrostatic MEMS device and to enhance its performance. The interconnection and damping assignment-passivity based control (IDA-PBC) method is used and the controller design involves coordinate transformations and a coupling between the mechanical and electrical subsystems of the device.