Verification of phase measurement error sources in phase-shifting interferometry with four step phase-shifting algorithms.

The phase-shifting technique is one of the most important techniques in interferometry. The measurement accuracy of this technique is affected by several kinds of systematic and random errors like miscalibration, nonlinear response and tilt shift of the phase shifter, nonlinear recording, speckles, fringe fluctuation, etc. In this paper, a method for verification of all of these phase measurement error sources is proposed by introducing a grayscale image.