The surface properties of zinc oxide powders prepared using mechanical activation, electron beam irradiation, and vacuum annealing, as well using combinations of these types of treatments, were studied using X-ray photoelectron spectroscopy. The structure of the obtained materials was studied by an X-ray diffraction technique and by scanning electron microscopy. We found that over five hours of grinding in an attritor, the size of nanocrystals decreases from 37 to 21 nm, and microdeformations increase from 0.
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