Integration of SmCo Micromagnets in a Ferromagnetic Multipolar Microrotor to Enhance MEMS and Micromotor Performance.

MEMS and micromotors may benefit from the increasing complexity of rotors by integrating a larger number of magnetic dipoles. In this article, a new microassembly and bonding process to integrate multiple SmCo micromagnets in a ferromagnetic core is presented. We experimentally demonstrate the feasibility of a multipolar micrometric magnetic rotor with 11 magnetic dipoles made of N35 SmCo micromagnets (length below 250 μm and thickness of 65 μm), integrated on a ferromagnetic core.