Publications by authors named "Ichiko Misumi"

Article Synopsis
  • - The study assessed variations in (220) lattice spacing of silicon (Si) based on different specimen processing methods for transmission electron microscopy (TEM), such as crushing, mechanical polishing, and a combination of mechanical and Ar ion polishing.
  • - While crushing and mechanical polishing alone showed similar lattice spacings, specimens subjected to combined processing illustrated an increase in lattice spacing correlating with longer Ar ion beam exposure.
  • - The findings indicate that both the processing method and measurement location significantly contribute to uncertainties in lattice spacing, which is critical for accurate magnification calibration in sub-nanometer metrology.
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The question of how to relate particle sizes measured using a fixed-angle dynamic light scattering (DLS) instrument with those measured using a multi-angle DLS instrument is addressed. A series of nearly monodisperse polystyrene latex (PSL) particles with nominal diameters of 100 nm, 70 nm, 50 nm, and 30 nm were measured using two different types of DLS instruments: one owned by the National Metrology Institute of Japan (NMIJ) of the multi-angle type and the other owned by the National Institute of Standards and Technology (NIST) of the fixed-angle type. The mean particle size of the PSL particles was measured using the multi-angle-type instrument at various scattering angles and at various concentrations of particle suspension.

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Atomic force microscopes (AFMs) are commonly and broadly regarded as being capable of three-dimensional imaging. However, conventional AFMs suffer from both significant functional constraints and imaging artifacts that render them less than fully three dimensional. To date a widely accepted consensus is still lacking with respect to characterizing the spatial dimensions of various AFM measurements.

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The cyclic error of a homodyne interferometer is caused mainly by phase mixing due to the imperfection of polarizing optical components such as polarizing beam splitters. In Appl. Opt.

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Most homodyne interferometers have a quadrature detector system that includes two polarizing beam splitters that cause nonlinearity of the order of a few nanometers by phase mixing. Detectors should have the same gains to reduce nonlinearity under the assumption that there is no loss in optical components. However, optical components exhibit some loss.

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