Shearing interference microscope for step-height measurements.

A shearing interference microscope using a Savart prism as the shear plate is proposed for inspecting step-heights. Where the light beam propagates through the Savart prism and microscopic system to illuminate the sample, it then turns back to re-pass through the Savart prism and microscopic system to generate a shearing interference pattern on the camera. Two measurement modes, phase-shifting and phase-scanning, can be utilized to determine the depths of the step-heights on the sample.