Vibration-resistant Fizeau interferometry using three-cavity multiplexing.

This study demonstrates a three-cavity multiplexing vibration-resistant Fizeau interferometry (TCM). The method injects a vibration-measurement pass (VMP), which utilizes three-cavity hybrid interference for the transmission of phase and vibration information, to the Fizeau phase-measurement pass (PMP). Moreover, the VMP is demultiplexed using the temporal difference of mixed fringes and synchronous phase-shifting phase extraction of difference fringe to obtain the vibration information, which is then used to calculate the measured phase combined with PMP.

Stitching interferometry using alternating calibration of positioning and systematic errors.

Stitching interferometry is an essential technique for the non-contact, high-precision measurement of large apertures or complex optical surfaces. However, the accuracy of full-aperture surface reconstruction is significantly compromised by subaperture positioning and systematic errors. To address this challenge, this study introduces a novel stitching interferometry method utilizing alternating calibration of positioning and systematic errors (SIAC).