Flexible, all-dielectric metasurface fabricated via nanosphere lithography and its applications in sensing.

In this letter, we report a flexible, all-dielectric metasurface fabricated via nanosphere lithography (NSL) and demonstrate its potentials in sensing applications. Regularly arrayed Si cylinders with hexagonal lattice fabricated on polyethylene terephthalate (PET) flexible substrate are exploited to detect applied strain and surface dielectric environment by measuring transmission spectra. Further numerical simulations coincide with experimental observations.