Nanoporous TiN/TiO/Alumina Membrane for Photoelectrochemical Hydrogen Production from Sewage Water.

An aluminum oxide, AlO, template is prepared using a novel Ni imprinting method with high hexagonal pore accuracy and order. The pore diameter after the widening process is about 320 nm. TiO layer is deposited inside the template using atomic layer deposition (ALD) followed by the deposition of 6 nm TiN thin film over the TiO using a direct current (DC) sputtering unit.