Dielectrophoretic capture of and boar sperms using ULSI-fabricated three-dimensional protruding TiN nano-electrode arrays.

Object: In recent years, dielectrophoresis has become widely recognized as a highly suitable method for creating good tools for particle separation, with significant successes achieved in a variety of areas.

Method: Expanding upon this, we adopted a semiconductor CMOS process, instead of a MEMS process, which allowed for the following: 1) wire insulation to mitigate Joule heat and prevent thermal fluctuation interference with the dielectrophoretic force; 2) isolation of harmful materials from biological samples, making the chip biocompatible; and, 3) the ability to employ nano-electrodes capable of generating a stronger electric field than conventional electrodes, thus allowing chip capture at lower voltages. Additionally, our chip is scalable, enabling multiplied throughput based on sample processing requirements.