This paper proposes an obliquely aligned InN nanorod array to maximize nanorod deformation in the application of nanopiezotronics. The surface-dependent piezotronic I-V characteristics of the InN nanorod array with exposed polar (0002) and semipolar ( ̅1102) planes were studied by conductive atomic force microscopy. The effects of the piezopotential, created in the InN under straining, and the surface quantum states on the transport behavior of charge carriers in different crystal planes of the InN nanorod were investigated.
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