Selective isotropic etching of SiO over SiN using NF/H remote plasma and methanol vapor.

In this study, an isotropic etching process of SiO selective to SiN using NF/H/methanol chemistry was investigated. HF was formed using a NF/H remote plasma, and in order to remove the F radicals, which induces spontaneous etching of Si-base material, methanol was injected outside the plasma discharge region. Through this process, etch products were formed on the surface of SiO, and then the (NH)SiF was removed by following heating process.

Atomic layer etching of Sn by surface modification with H and Cl radicals.

Sn is the one of the materials that can be used for next generation extreme ultraviolet (EUV) mask material having a high absorption coefficient and, for the fabrication of the next generation EUV mask, a precise etching of Sn is required. In this study, the atomic layer etching (ALE) process was performed for the precise etch thickness control and low damage etching of Sn by the formation SnHClcompounds on the Sn surface using with H and Cl radicals during the adsorption step and by the removal of the compound using Arions with a controlled energy during the desorption step. Through this process, optimized ALE conditions with different H/Cl radical combinations that can etch Sn at ∼2.

3-O-Acetyloleanolic acid exhibits anti-angiogenic effects and induces apoptosis in human umbilical vein endothelial cells.

3-O-Acetyloleanolic acid, a pentacyclic triterpenoid isolated from cowpea seeds, inhibited proliferation, migration and tube formation of human umbilical vein endothelial cells (HUVECs) in a dose-dependent manner. HUVECs. The induced apoptosis was characterized by detection of cell surface annexin V and sub-G1 populations.

3-O-acetyloleanolic acid induces apoptosis in human colon carcinoma HCT-116 cells.

The cytotoxic effect of 3-O-acetyloleanolic acid, an oleanolic acid derivative isolated from the seeds of Vigna sinensis K., was investigated in human colon carcinoma HCT-116 cells. 3-O-acetyloleanolic acid dose-dependently inhibited the viability of HCT-116 cells.

Saengshik, a formulated health food, prevents liver damage in CCl4-induced mice and increases antioxidant activity in elderly women.

Saengshik is a Korean noncooked food made with of more than 30 different whole gains, vegetables, fruits, mushrooms, and seaweeds. All of these ingredients are frozen and dried to minimize the loss of nutrients. Saengshik has become popular among health-conscious people in the Republic of Korea.

A polysaccharide extracted from rice bran fermented with Lentinus edodes enhances natural killer cell activity and exhibits anticancer effects.

The objective of this study was to investigate the activation of natural killer (NK) cells and anticancer effects of exo-biopolymer from rice bran cultured with Lentinus edodes [rice bran exo-biopolymer (RBEP)]. Oral administration of RBEP induced the activation of NK cells in a dose-dependent manner. RBEP also prolonged the life spans of mice transplanted with Sarcoma-180 cells and inhibited growing Sarcoma-180 cells in intraperitoneum.