Fabrication of SiN@Si@Cu Thin Films by RF Sputtering as High Energy Anode Material for Li-Ion Batteries.

Silicon and silicon nitride (SiN) are some of the most appealing candidates as anode materials for LIBs (Li-ion battery) due to their favorable characteristics: low cost, abundance of Si, and high theoretical capacity. However, these materials have their own set of challenges that need to be addressed for practical applications. A thin film consisting of silicon nitride-coated silicon on a copper current collector (SiN@Si@Cu) has been prepared in this work via RF magnetron sputtering (Radio Frequency magnetron sputtering).