Nonlinear Dynamic Response of Nanocomposite Microbeams Array for Multiple Mass Sensing.

A nonlinear MEMS multimass sensor is numerically investigated, designed as a single input-single output (SISO) system consisting of an array of nonlinear microcantilevers clamped to a shuttle mass which, in turn, is constrained by a linear spring and a dashpot. The microcantilevers are made of a nanostructured material, a polymeric hosting matrix reinforced by aligned carbon nanotubes (CNT). The linear as well as the nonlinear detection capabilities of the device are explored by computing the shifts of the frequency response peaks caused by the mass deposition onto one or more microcantilever tips.

Self-Excited Microcantilever with Higher Mode Using Band-Pass Filter.

Microresonators have a variety of scientific and industrial applications. The measurement methods based on the natural frequency shift of a resonator have been studied for a wide range of applications, including the detection of the microscopic mass and measurements of viscosity and stiffness. A higher natural frequency of the resonator realizes an increase in the sensitivity and a higher-frequency response of the sensors.

Nanoscale cutting using self-excited microcantilever.

The application of self-excitation is proposed to improve the efficiency of the nanoscale cutting procedure based on use of a microcantilever in atomic force microscopy. The microcantilever shape is redesigned so that it can be used to produce vibration amplitudes with sufficient magnitudes to enable the excitation force applied by an actuator to be transferred efficiently to the tip of the microcantilever for the cutting process. A diamond abrasive that is set on the tip is also fabricated using a focused ion beam technique to improve the cutting effect.

Sensorless Self-Excited Vibrational Viscometer with Two Hopf Bifurcations Based on a Piezoelectric Device.

In this study, we propose a high-sensitivity sensorless viscometer based on a piezoelectric device. Viscosity is an essential parameter frequently used in many fields. The vibration type viscometer based on self-excited oscillation generally requires displacement sensor although they can measure high viscosity without deterioration of sensitivity.

Ultra-Sensitive Minute Mass Sensing Using a Microcantilever Virtually Coupled with a Virtual Cantilever.

Mass sensors based on the eigenmode shift of coupled cantilevers achieve much higher sensitivity than those based on the single cantilever's eigenfrequency shift. In the former sensors, two identical cantilevers and a weak coupling stiffness between them are required to achieve high sensitivity. However, conventional coupled cantilevers cannot satisfy these requirements because of machining accuracy.