Laboratory demonstration of a cryogenic deformable mirror for wavefront correction of space-borne infrared telescopes.

This paper demonstrates a cryogenic deformable mirror (DM) with 1020 actuators based on micro-electrical mechanical systems (MEMS) technology. Cryogenic space-borne infrared telescopes can experience a wavefront error due to a figure error of their mirror surface, which makes the imaging performance worse. For on-orbit wavefront correction as one solution, we developed a MEMS-processed electro-static DM with a special surrounding structure for use under the cryogenic temperature.