Deconvolution of damping forces with a nonlinear microresonator.

We report a fully electrical microcantilever device that utilizes capacitance for both actuation and detection and show that it can characterize various gases with a bare silicon microcantilever. We find the motion of the cantilever as it rings down when the oscillating force is removed, by measuring the voltage induced by the oscillating capacitance in the microcantilever∕counterelectrode system. The ringdown waveform was analyzed using an iterative numerical algorithm to calculate the oscillator motion, modeling the cantilever∕electrode capacitance to calculate the electrostatic force.