Decomposition of CrN induced by laser-assisted atom probe tomography.

It is known that measurement parameters can significantly influence the elemental composition determined by atom probe tomography (APT). Especially results obtained by laser-assisted APT show a strong effect of the laser pulse energy on the apparent elemental composition. Within this study laser-assisted APT experiments were performed on CrN and thermally more stable (CrAl)N, comparing two different base temperatures (i.

Efficient preparation of microtip arrays for atom probe tomography using fs-laser processing.

Microtip arrays, also called microtip coupons, are routinely used in atom probe tomography (APT) as specimen carriers. They are commercially available consumables, usually made of Si with high electrical conductivity, produced via dedicated shaping techniques. Their purpose is to act as a specimen mount after focused ion beam (FIB) based lift-out procedures.