Modeling Mechanism and Growth Reactions for New Nanofabrication Processes by Atomic Layer Deposition.

Recent progress in the simulation of the chemistry of atomic layer deposition (ALD) is presented for technologically important materials such as alumina, silica, and copper metal. Self-limiting chemisorption of precursors onto substrates is studied using density functional theory so as to determine reaction pathways and aid process development. The main challenges for the future of ALD modeling are outlined.

Optical waveguide sensor of volatile organic compounds based on PTA thin film.

In this study, a sensitive optical waveguide (OWG) sensor for the detection and identification of volatile organic compounds (VOCs) was reported. The sensing membrane is constructed by immobilization of peroxopolytungsten acid (PTA) thin film over a single-mode potassium ion (K(+)) exchanged glass OWG by spin-coating method. A laser beam was coupled into and out of the glass optical waveguide using prism couplers, and dry air functioned as a carrier gas.

Optical waveguide BTX gas sensor based on polyacrylate resin thin film.

An optical sensor sensitive to BTX has been developed by spin coating a thin film of polyacrylate resin onto a tin- diffused glass optical waveguide. A pair of prism coupler was employed for optical coupling matched with diiodomethane (CH2l2). The guided wave transmits in waveguide layer and passes through the film as an evanescent wave.

Nafion film/K(+)-exchanged glass optical waveguide sensor for BTX detection.

An optical waveguide (OWG) sensor for the detection of BTX gases is reported. The highly sensitive element of this sensor was made by coating the copper Nafion film over a single-mode potassium ion exchanged glass OWG. We used the OWG sensor to detect toluene gas as a typical example BTX gas.