Research on Abnormal State Detection of CZ Silicon Single Crystal Based on Multimodal Fusion.

The Czochralski method is the primary technique for single-crystal silicon production. However, anomalous states such as crystal loss, twisting, swinging, and squareness frequently occur during crystal growth, adversely affecting product quality and production efficiency. To address this challenge, we propose an enhanced multimodal fusion classification model for detecting and categorizing these four anomalous states.