Publications by authors named "Hangfeng Hu"
Article Synopsis
- - This study introduces a new method using differential algebra to analyze the evolution of current density distribution (CDD) in beams of secondary electrons (SE), breaking the beam into smaller sections called beamlets.
- - Each beamlet is traced individually, allowing researchers to derive a current density function based on factors like initial angles, energy, and size of the emission source, which are then integrated to find the overall CDD.
- - The method is validated through experiments with a scanning electron microscope (SEM), demonstrating that the calculated CDD aligns well with observed images, showcasing the potential for improvements in SE detection systems.
In this paper, a novel scheme based on the differential algebraic (DA) method is proposed to analyze the electron optics properties of the Wien filters. A new software package is then developed, to compute the geometrical and chromatic aberrations up to the fifth order of the Wien filters. For examples, the aberrations of single filter and the double filters are calculated.
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