The effect of an annealing process on atomic layer deposited TiOthin films.

In this paper, we study the property changes in TiOthin films related to annealing under various conditions. XPS analysis showed that the concentration of oxygen vacancies in TiOthin films was reduced by annealing. In the case of annealing in an Oand air atmosphere, the oxygen vacancy concentration was reduced to the greatest extent as oxygen diffused into the TiOthin film and rearrangement of atoms occurred.