3D force and displacement sensor for SFA and AFM measurements.

A new device has been designed, and a prototype built and tested, that can simultaneously measure the displacements and/or the components of a force in three orthogonal directions. The "3D sensor" consists of four or eight strain gauges attached to the four arms of a single cross-shaped force-measuring cantilever spring. Finite element modeling (FEM) was performed to optimize the design configuration to give desired sensitivity of force, displacement, stiffness, and resonant frequency in each direction (x, y, and z) which were tested on a "mesoscale" device and found to agree with the predicted values to within 4-10%.