Parameter dependence of depth and lateral resolution of transmission Kikuchi diffraction.

The spatial resolution of transmission Kikuchi diffraction (TKD) depends on experimental parameters such as atomic number, accelerating voltage, sample backtilt and thickness. In this work, the dependence of spatial resolution on these parameters is explored by using bilayered coarse-grained/nanocrystalline samples to determine the depth resolution. Digital image correlation of the Kikuchi patterns across grain boundaries is used to measure the lateral resolution.