Low loss SiGe graded index waveguides for mid-IR applications.

In the last few years Mid InfraRed (MIR) photonics has received renewed interest for a variety of commercial, scientific and military applications. This paper reports the design, the fabrication and the characterization of SiGe/Si based graded index waveguides and photonics integrated devices. The thickness and the Ge concentration of the core layer were optimized to cover the full [3 - 8 µm] band.