Interferometric characterization of rotation stages for X-ray nanotomography.

The field of three-dimensional multi-modal X-ray nanoimaging relies not only on high-brilliance X-rays but also on high-precision mechanics and position metrology. Currently available state-of-the-art linear and rotary drives can provide 3D position accuracy within tens to hundreds of nm, which is often insufficient for high resolution imaging with nanofocused X-ray beams. Motion errors are especially troublesome in the case of rotation drives and their correction is more complicated and relies on the metrology grade reference objects.

Automatic alignment of a Kirkpatrick-Baez active optic by use of a soft-x-ray Hartmann wavefront sensor.

We present what we believe to be the first automatic alignment of a synchrotron beamline by the Hartmann technique. Experiments were performed, in the soft-x-ray range (E=3 keV, lambda=0.414 nm), by using a four-actuator Kirkpatrick-Baez (KB) active optic.