Advances in physical vapor deposited silicon/carbon based anode materials for Li-ion batteries.

This paper explores the latest developments in physical vapor deposition (PVD) techniques for fabricating silicon-carbon (Si/C) based thin films as anodes of Lithium-Ion batteries (LiBs). Properties of Si/C based materials, such as high thermal stability, electrical conductivity and mechanical strength, have addressed the critical challenges associated with the use silicon as anode material for LiBs, including as volume expansion during lithiation, structural stability and electrode degradation. The review article aims to provide recent advances in the use of Si/C-based thin film materials deposited via PVD processes as anodes for LiBs.