Mueller ellipsometry in the mid-infrared (IR) spectral range can be used to obtain information about chemical composition through the vibrational spectra of samples. In the case of very thin films (<100 nm), the ellipsometric spectral features due to vibrational absorption are in general quite weak, and sometimes they are hidden by the noise in the measured data. In this work, we present one method based on the use of optical spacers as a tool to enhance the sensitivity of IR Mueller ellipsometry.
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