Atomization of High-Viscosity Fluids for Aromatherapy Using Micro-heaters for Heterogeneous Bubble Nucleation.

The development of a novel lead-free microelectromechanical-system (MEMS)-based atomizer using the principle of thermal bubble actuation is presented. It is a low-cost, lead-free design that is environmentally friendly and harmless to humans. It has been tested to be applicable over a wide range of fluid viscosities, ranging from 1 cP (e.