Publications by authors named "Geert Van den Bosch"

Article Synopsis
  • We studied how the metal gate work function changes with various metal and high-k dielectric combinations by measuring capacitance-voltage shifts, especially focusing on dielectric thickness.
  • We looked into how different thermal treatments affect the work function and connected shifts to dipole formations at the interfaces between metal/high-k and high-k/SiO.
  • Our findings on work function changes were supported by testing the erase performance of metal/high-k/ONO/Si capacitors, revealing that while dipole formation complicates the work function extraction, it doesn't greatly impact erase performance.
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