Publications by authors named "Geert Van den Bosch"
Micromachines (Basel)
September 2021
Article Synopsis
- We studied how the metal gate work function changes with various metal and high-k dielectric combinations by measuring capacitance-voltage shifts, especially focusing on dielectric thickness.
- We looked into how different thermal treatments affect the work function and connected shifts to dipole formations at the interfaces between metal/high-k and high-k/SiO.
- Our findings on work function changes were supported by testing the erase performance of metal/high-k/ONO/Si capacitors, revealing that while dipole formation complicates the work function extraction, it doesn't greatly impact erase performance.
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