CCD Multi-Ion Image Sensor with Four 128 × 128 Pixels Array.

A semiconductor array pH image sensor consisting of four separated blocks was fabricated using charged coupled device (CCD) and complementary metal oxide semiconductor (CMOS) technologies. The sensing surface of one of the four blocks was Si₃N₄ and this block responded to H⁺. The surfaces of the other three blocks were respectively covered with cation sensitive membranes, which were separately printed with plasticized poly (vinyl chloride) solutions including Na⁺, K⁺, and Ca ionophores by using an ink-jet printing method.

High-Density 2-μm-Pitch pH Image Sensor With High-Speed Operation up to 1933 fps.

Various biosensing platforms for real-time monitoring and mapping of chemical signals in neural networks have been developed based on CMOS process technology. Despite their achievements, however, there remains a demand for an advanced method that can offer detailed insights into cellular functions with higher spatiotemporal resolution. Here, we present a pH image sensor that employs a high-density array of 256 × 256 pixels and readout circuitry designed for fast operation.