Photonic crystal structures in ion-sliced lithium niobate thin films.

We report on the first realization of photonic crystal structures in 600-nm thick ion-sliced, single-crystalline lithium niobate thin films bonded on a lithium niobate substrate using adhesive polymer benzocyclobutene (BCB). Focused ion beam (FIB) milling is used for fast prototyping of photonic crystal structures with regular cylindrical holes. Unwanted redeposition effects leading to conically shaped holes in lithium niobate are minimized due to the soft BCB layer underneath.