Development of a piezoelectric vacuum sensing component for a wide pressure range.

In this study, we develop a clamped-clamped beam-type piezoelectric vacuum pressure sensing element. The clamped-clamped piezoelectric beam is composed of a PZT layer and a copper substrate. A pair of electrodes is set near each end.

Note: automatic mass-flow configuration method for evaluating turbomolecular pump performance.

An automatic mass-flow configuration method is presented for the evaluation of turbomolecular pump performance. This configuration method is used to obtain an effective mass-flow rate. In addition, the throughput, inlet pressure, and compression ratio are evaluated.