Target Design in SEM-Based Nano-CT and Its Influence on X-ray Imaging.

Nano-computed tomography (nano-CT) based on scanning electron microscopy (SEM) is utilized for multimodal material characterization in one instrument. Since SEM-based CT uses geometrical magnification, X-ray targets can be adapted without any further changes to the system. This allows for designing targets with varying geometry and chemical composition to influence the X-ray focal spot, intensity and energy distribution with the aim to enhance the image quality.