Optimization of the annealed proton exchange method with controlled annealing for multifunctional integrated optical chip production.

The main objective of our study is to develop a new approach to the annealed proton exchange (APE) method for the fabrication of the multifunctional integrated optical chip (MIOC) used in fiber-optic gyro systems and to eliminate the loss of time and material, especially in mass production applications. In this work, self-polarized waveguides, which are the basic components of a MIOC device, were produced by the APE method and studied. With the developed method, controlled annealing trials have been carried out from a certain region on the substrate used in waveguide production, and the annealing time specific to the annealing process was determined.