Large-scale pattern transfer based on non-through-hole AAO self-supporting membranes.

Fabricating large-scale nanoarrays is a significant and challenging work in the field of nanometer devices. Anodic aluminum oxide (AAO) membrane is considered as a promising mask due to its inherent advantages such as low-cost and tunable pore diameter. However, there are few reports on the use of non-through-hole large-area AAO membrane as a mask.