Comprehensive Noise Modeling of Piezoelectric Charge Accelerometer with Signal Conditioning Circuit.

This paper reports on noise modeling of a piezoelectric charge accelerometer with a signal conditioning circuit. The charge output is converted into voltage and amplified using a JFET operational amplifier that has high input resistance and low noise. The noise sources in the whole system include electrical and mechanical thermal noises of the accelerometer, thermal noises of resistors, and voltage and current noises of the operational amplifier.

The Fabrication and Indentation of Cubic Silicon Carbide Diaphragm for Acoustic Sensing.

In this study, 550 nm thick cubic silicon carbide square diaphragms were back etched from Si substrate. Then, indentation was carried out to samples with varying dimensions, indentation locations, and loads. The influence of three parameters is documented by analyzing load-displacement curves.

Noise as Diagnostic Tool for Quality and Reliability of MEMS.

This perspective explores future research approaches on the use of noise characteristics of microelectromechanical systems (MEMS) devices as a diagnostic tool to assess their quality and reliability. Such a technique has been applied to electronic devices. In comparison to these, however, MEMS have much more diverse materials, structures, and transduction mechanisms.

Power Management IC for a Dual-Input-Triple-Output Energy Harvester.

We present the design of a power management integrated circuit that processes harvested energy from radio frequency waves and piezoelectric vibrations. The rectification of piezoelectric and RF sources has a power conversion efficiency (PCE) of 87.73% and 74.

A Review of MEMS Capacitive Microphones.

This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrication method, material, dimension, and performances.

Reactive Sputtering of Aluminum Nitride (002) Thin Films for Piezoelectric Applications: A Review.

We summarize the recipes and describe the role of sputtering parameters in producing highly c-axis Aluminum Nitride (AlN) films for piezoelectric applications. The information is collated from the analysis of around 80 journal articles that sputtered this film on variety of substrate materials, processes and equipment. This review will be a good starting point to catch up with the state-of-the-arts research on the reactive sputtering of AlN (002) thin film, as well as its evolving list of piezoelectric applications such as energy harvesters.

Magnetically-Actuated Mixing and Merging of Acid-Base Micro-Droplets on Open Surfaces: Preliminary Study.

We present the mixing and merging of two reactive droplets on top of an open surface. A mobile droplet (1.0 M HCl solution + iron oxide particles) is magnetically-actuated to merge with a sessile droplet (1.

Digital microfluidics with a magnetically actuated floating liquid marble.

Controlled actuation of a floating liquid marble, a liquid droplet coated with hydrophobic particles floating on another liquid surface, is a potential digital microfluidics platform for the transport of aqueous solution with minimal volume loss. This paper reports our recent investigation on the magnetic actuation of floating liquid marbles filled with magnetic particles. The magnetic force and frictional force acting on the floating liquid marble determine the horizontal movement of the marble.