Grating-assisted coupling of terahertz waves into a dielectric waveguide studied by terahertz time-domain spectroscopy.

We report on the efficient coupling of terahertz (THz) waves into a dielectric waveguide by means of a diffraction grating engraved at the top of the waveguide. The waveguide is made of a 201-microm-thick high-resistivity silicon wafer. The transmission of the device, measured versus frequency by terahertz time-domain spectroscopy, shows usual m lines when a frequency component of the THz pulse spectrum satisfies the phase-matching condition and is coupled into the waveguide.