Water-assisted purification during electron beam-induced deposition of platinum and gold.

Direct fabrication of pure metallic nanostructures is one of the main aims of focused electron beam-induced deposition (FEBID). It was recently achieved for gold deposits by the co-injection of a water precursor and the gold precursor Au(tfac)Me. In this work results are reported, using the same approach, on a different gold precursor, Au(acac)Me, as well as the frequently used platinum precursor MeCpPtMe.