Characterization of Structural, Optical, Corrosion, and Mechanical Properties of HfO Thin Films Deposited Using Pulsed DC Magnetron Sputtering.

Various properties of HfO, such as hardness, corrosion, or electrical resistance, depend on the method and the conditions of deposition. In this work, a thorough comparison of scarcely investigated mechanical properties of HfO thin films deposited with different conditions of reactive magnetron sputtering process is presented. Four thin films were sputtered in processes that varied in plasma ignition method (continuous or sequential) and target-substrate distance.

Hydrogen Gas Sensing Properties of Mixed Copper-Titanium Oxide Thin Films.

Hydrogen is an efficient source of clean and environmentally friendly energy. However, because it is explosive at concentrations higher than 4%, safety issues are a great concern. As its applications are extended, the need for the production of reliable monitoring systems is urgent.