Direct nanoimprint of chalcogenide glasses with optical functionalities via solvent-based surface softening.

Chalcogenide glasses are attractive materials for optical applications. However, these applications often require patterning of the surface with functional micro-/ nanostructures. Such patterning is challenging by traditional microfabrication methods.

Surface plasticizing of chalcogenide glasses: a route for direct nanoimprint with multifunctional antireflective and highly hydrophobic structures.

Chalcogenide glasses are attractive materials for optical applications. However, these applications often require pattering of the surface with functional micro-/ nanostructures, which is challenging by traditional microfabrication. Here, we present a novel, robust, and scalable approach for the direct patterning of chalcogenide glasses, based on soft imprinting of a solvent-plasticized glass layer formed on the glass surface.