Investigation of Photoluminescence Mechanisms from SiO2/Si:SiO2/SiO2 Structures in Weak Quantum Confined Regime by Deconvolution of Photoluminescence Spectra.

Si nanocrystals embedded in SiO2 matrix were prepared by co-sputtering method followed by a post annealing process in N2 ambient. By fixing sputtering parameters, the effects of annealing time and annealing temperature on the optical properties of Si nanocrystals are investigated. Origin and evolution of the photoluminescence (PL) in weak quantum confinement regime are discussed in the light of X-ray diffraction, Fourier transform infrared, and temperature dependent photoluminescence measurements.