Conception of a single-component broadband high-resolution plane-VLS-grating monochromator.

We propose a broadband single-element monochromator with a constant deviation angle and fixed slits for the wavelength range of 3-60 nm, which uses a grazing incidence plane varied line-space (VLS) grating with exponential dependence of line frequency across the aperture. Wavelength scanning is performed by translating the VLS grating along its surface. The deviation angle is constant, and the source, input, and output slits are stationary.