Fabrication, Microstructure and Plasma Resistance Behavior of Y-Al-Si-O (YAS) Glass-Ceramics Coated on Alumina Ceramics.

This study investigates the fabrication, microstructural characteristics and plasma resistance of Y-Al-Si-O (YAS) glass-ceramics coated on alumina ceramics. YAS frits were initially prepared using a melt-quenching method, then homogenously milled and coated onto alumina ceramics. The melt-coating process was conducted at 1650 °C for 1 h.