Parallel nanomanufacturing via electrohydrodynamic jetting from microfabricated externally-fed emitter arrays.

We report the design, fabrication, and characterization of planar arrays of externally-fed silicon electrospinning emitters for high-throughput generation of polymer nanofibers. Arrays with as many as 225 emitters and with emitter density as large as 100 emitters cm(-2) were characterized using a solution of dissolved PEO in water and ethanol. Devices with emitter density as high as 25 emitters cm(-2) deposit uniform imprints comprising fibers with diameters on the order of a few hundred nanometers.