Linear and rotational microhydraulic actuators driven by electrowetting.

Microhydraulic actuators offer a new way to convert electrical power to mechanical power on a microscale with an unmatched combination of power density and efficiency. Actuators work by combining surface tension force contributions from a large number of droplets distorted by electrowetting electrodes. This paper reports on the behavior of microgram-scale linear and rotational microhydraulic actuators with output force/weight ratios of 5500, cycle frequencies of 4 kilohertz, <1-micrometer movement precision, and accelerations of 3 kilometers/second The power density and the efficiency of the actuators were characterized by simultaneously measuring the mechanical work performed and the electrical power applied.

Re-engineering artificial muscle with microhydraulics.

We introduce a new type of actuator, the microhydraulic stepping actuator (MSA), which borrows design and operational concepts from biological muscle and stepper motors. MSAs offer a unique combination of power, efficiency, and scalability not easily achievable on the microscale. The actuator works by integrating surface tension forces produced by electrowetting acting on scaled droplets along the length of a thin ribbon.